Various thin-film deposition tools, including PVD (e-beam & thermal evaporators, DC & RF magnetron (reactive) sputterers) and CVD (APCVD of graphene, Si oxidation, PECVD of SiO2 and SiNx). Available ...

Cool, fine-grain sputtering is achieved with a very efficient low voltage DC magnetron head. Although it is our simplest coater, this model has an excellent specification: This coater is ideal for ...